GB/T 17866-1999 China
national
standard english version:
GB
中华人民共和国
国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 17866-1999
Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems 掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则
Issued Date:1999-09-13
Implemented Date:2000-06-01
Issued by:
The Standardization Administration of the People's Republic of China
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