GB/T 34900-2017 China
national
standard english version:
GB
中华人民共和国
国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 34900-2017
Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构残余应变测量方法
Issued Date:2017-11-01
Implemented Date:2018-05-01
Issued by:
The Standardization Administration of the People's Republic of China
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