China 'GB/T 14141-2009
' standard english version:
NATIONAL STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 14141-2009
Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array 硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法
Issued Date:2009-10-30
Implemented Date:2010-06-01
Issued by:
The Standardization Administration of the People's Republic of China