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Standard Code | Standard Title | Standard Class | Order |
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GB/T 40110-2021 |
Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy 表面化学分析 全反射X射线荧光光谱法(TXRF)测定硅片表面元素污染 |
China National Standards TXRF |
English PDF |
GB/T 30701-2014 |
Surface chemical analysis―Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy 表面化学分析 硅片工作标准样品表面元素的化学收集方法和全反射X射线荧光光谱法(TXRF)测定 |
China National Standards TXRF |
English PDF |
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