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China Micro-electromechani GB Standards English PDF List


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  •  China "Micro-electromechani" GB Standards English PDF List:
  • Standard  Code Standard Title Standard Class Order
    GB/T 2900.104-2021 Electrotechnical terminology—Micro-electromechanical devices
    电工术语 微机电装置
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 38446-2020 Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films
    微机电系统(MEMS)技术 带状薄膜抗拉性能的试验方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 38447-2020 Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
    微机电系统(MEMS)技术 MEMS结构共振疲劳试验方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 38341-2019 Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments
    微机电系统(MEMS)技术 MEMS器件的可靠性综合环境试验方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 34894-2017 Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer
    微机电系统(MEMS)技术 基于光学干涉的MEMS微结构应变梯度测量方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 34900-2017 Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer
    微机电系统(MEMS)技术 基于光学干涉的MEMS微结构残余应变测量方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 34893-2017 Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
    微机电系统(MEMS)技术 基于光学干涉的MEMS微结构面内长度测量方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 34899-2017 Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy
    微机电系统(MEMS)技术 基于拉曼光谱法的微结构表面应力测试方法
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS
    半导体器件 微机电器件 MEMS总规范
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 26113-2010 Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters
    微机电系统(MEMS)技术 微几何量评定总则
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 26112-2010 Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters
    微机电系统(MEMS)技术 微机械量评定总则
    China National Standards
    Micro-electromechani

    English PDF
    GB/T 26111-2010 Micro-electromechanical system technology - Terms
    微机电系统(MEMS)技术 术语
    China National Standards
    Micro-electromechani

    English PDF

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