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Standard Code | Standard Title | Standard Class | Order |
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GB/T 42597-2023 |
Micro-electro-Mechanical Systems (MEMS) Technology Gyroscopes 微机电系统(MEMS)技术 陀螺仪 |
China National Standards Micro-electr |
English PDF |
GB/T 42158-2023 |
Micro-electro-Mechanical Systems (MEMS) Technology-Description and Measurement Methods of Micro-grooves and Pyramidal Needle Structures 微机电系统(MEMS)技术 微沟槽和棱锥式针结构的描述和测量方法 |
China National Standards Micro-electr |
English PDF |
GB/T 2900.104-2021 |
Electrotechnical terminology—Micro-electromechanical devices 电工术语 微机电装置 |
China National Standards Micro-electr |
English PDF |
GB/T 38446-2020 |
Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films 微机电系统(MEMS)技术 带状薄膜抗拉性能的试验方法 |
China National Standards Micro-electr |
English PDF |
GB/T 38447-2020 |
Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration 微机电系统(MEMS)技术 MEMS结构共振疲劳试验方法 |
China National Standards Micro-electr |
English PDF |
GB/T 38341-2019 |
Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments 微机电系统(MEMS)技术 MEMS器件的可靠性综合环境试验方法 |
China National Standards Micro-electr |
English PDF |
GB/T 34894-2017 |
Micro-electromechanical system technology—Measuring method for strain gradient measurements of MEMS microstructures using an optical interferometer 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构应变梯度测量方法 |
China National Standards Micro-electr |
English PDF |
GB/T 34900-2017 |
Micro-electromechanical system technology—Measuring method for residual strain measurements of MEMS microstructures using an optical interferometer 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构残余应变测量方法 |
China National Standards Micro-electr |
English PDF |
GB/T 34893-2017 |
Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer 微机电系统(MEMS)技术 基于光学干涉的MEMS微结构面内长度测量方法 |
China National Standards Micro-electr |
English PDF |
GB/T 34899-2017 |
Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy 微机电系统(MEMS)技术 基于拉曼光谱法的微结构表面应力测试方法 |
China National Standards Micro-electr |
English PDF |
GB/T 32817-2016 |
Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS 半导体器件 微机电器件 MEMS总规范 |
China National Standards Micro-electr |
English PDF |
GB/T 26113-2010 |
Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters 微机电系统(MEMS)技术 微几何量评定总则 |
China National Standards Micro-electr |
English PDF |
GB/T 26112-2010 |
Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters 微机电系统(MEMS)技术 微机械量评定总则 |
China National Standards Micro-electr |
English PDF |
GB/T 26111-2010 |
Micro-electromechanical system technology - Terms 微机电系统(MEMS)技术 术语 |
China National Standards Micro-electr |
English PDF |
GB 50467-2008 |
Code for construction and acceptance of Micro-electronics manufacturing equipment installation engineering 微电子生产设备安装工程施工及验收规范 |
China National Standards Micro-electr |
English PDF |
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