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  •  China "wafer" GB Standards English PDF List:
  • Standard  Code Standard Title Standard Class Order
    GB/T 43493.3-2023 Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 3: Photoluminescence detection method of defects
    半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第3部分:缺陷的光致发光检测方法
    China National Standards
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    GB/T 43493.2-2023 Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 2: Optical detection methods for defects
    半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第2部分:缺陷的光学检测方法
    China National Standards
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    GB/T 43493.1-2023 Semiconductor devices - Non-destructive testing and identification criteria for defects in silicon carbide homoepitaxial wafers for power devices - Part 1: Defect classification
    半导体器件 功率器件用碳化硅同质外延片缺陷的无损检测识别判据 第1部分:缺陷分类
    China National Standards
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    GB/T 43315-2023 Detection of silicon wafer flow pattern defects Corrosion method
    硅片流动图形缺陷的检测 腐蚀法
    China National Standards
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    GB/T 43313-2023 Testing of surface quality and microtube density of polished silicon carbide wafers by confocal differential interference method
    碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法
    China National Standards
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    GB/T 42907-2023 Testing of non-equilibrium carrier recombination lifetime in silicon ingots, silicon blocks and silicon wafers Non-contact eddy current induction method
    硅锭、硅块和硅片中非平衡载流子复合寿命的测试 非接触涡流感应法
    China National Standards
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    GB/T 42902-2023 Testing of surface defects of silicon carbide epitaxial wafers Laser scattering method
    碳化硅外延片表面缺陷的测试 激光散射法
    China National Standards
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    GB/T 42789-2023 Test method for silicon wafer surface gloss
    硅片表面光泽度的测试方法
    China National Standards
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    GB/T 6616-2023 Testing of semiconductor wafer resistivity and semiconductor film sheet resistance non-contact eddy current method
    半导体晶片电阻率及半导体薄膜薄层电阻的测试 非接触涡流法
    China National Standards
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    GB/T 42706.5-2023 Electronic components - Long term storage of semiconductor devices - Part 5: Chips and wafers
    电子元器件 半导体器件长期贮存 第5部分:芯片和晶圆
    China National Standards
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    GB/T 30656-2023 Silicon carbide single crystal polished wafer
    碳化硅单晶抛光片
    China National Standards
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    GB/T 32280-2022 Test method for warp and bow of silicon wafers—Automated non-contact scanning method
    硅片翘曲度和弯曲度的测试  自动非接触扫描法
    China National Standards
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    GB/T 26069-2022 Annealed monocrystalline silicon wafers
    硅单晶退火片
    China National Standards
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    GB/T 41325-2022 Low-density crystal primary pit silicon single crystal polishing wafer for integrated circuits
    集成电路用低密度晶体原生凹坑硅单晶抛光片
    China National Standards
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    GB/T 41853-2022 Semiconductor devices MEMS devices wafer-to-wafer bond strength measurement
    半导体器件 微机电器件 晶圆间键合强度测量
    China National Standards
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    GB/T 40391-2021 Aluminum matrix composite wafers
    铝基复合圆片
    China National Standards
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    GB/T 40279-2021 Test method for thickness of films on silicon wafer surface—Optical reflection method
    硅片表面薄膜厚度的测试 光学反射法
    China National Standards
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    GB/T 40110-2021 Surface chemical analysis - Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
    表面化学分析 全反射X射线荧光光谱法(TXRF)测定硅片表面元素污染
    China National Standards
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    GB/T 39145-2020 Test method for the content of surface metal elements on silicon wafers—Inductively coupled plasma mass spectrometry
    硅片表面金属元素含量的测定 电感耦合等离子体质谱法
    China National Standards
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    GB/T 11094-2020 Gallium arsenide single crystal and cutting wafer grown by horizontal bridgman method
    水平法砷化镓单晶及切割片
    China National Standards
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    GB/T 29055-2019 Multicrystalline silicon wafers for photovoltaic solar cell
    太阳能电池用多晶硅片
    China National Standards
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    GB/T 14139-2019 Silicon epitaxial wafers
    硅外延片
    China National Standards
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    GB/T 16596-2019 Specification for establishing a wafer coordinate system
    确定晶片坐标系规范
    China National Standards
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    GB/T 16595-2019 Specification for a universal wafer grid
    晶片通用网格规范
    China National Standards
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    GB/T 37053-2018 General specification for epitaxial wafers and substrates based on gallium nitride
    氮化镓外延片及衬底片通用规范
    China National Standards
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    GB/T 19921-2018 Test method for particles on polished silicon wafer surfaces
    硅抛光片表面颗粒测试方法
    China National Standards
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    GB/T 26068-2018 Test method for carrier recombination lifetime in silicon wafers and silicon ingots—Non-contact measurement of photoconductivity decay by microwave reflectance method
    硅片和硅锭载流子复合寿命的测试-非接触微波反射光电导衰减法
    China National Standards
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    GB/T 26071-2018 Monocrystalline silicon wafers for solar cells
    太阳能电池用硅单晶片
    China National Standards
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    GB/T 12964-2018 Monocrystalline silicon polished wafers
    硅单晶抛光片
    China National Standards
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    GB/T 12965-2018 Monocrystalline silicon as cut wafers and lapped wafers
    硅单晶切割片和研磨片
    China National Standards
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    GB/T 34479-2017 Specification for alphanumeric marking of silicon wafers
    硅片字母数字标志规范
    China National Standards
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    GB/T 34504-2017 Measurement method for surface metal contamination on sapphire polished substrate wafer
    蓝宝石抛光衬底片表面残留金属元素测量方法
    China National Standards
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    GB/T 34177-2017 Quartz glass wafer for lithography
    光刻用石英玻璃晶圆
    China National Standards
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    GB/T 33922-2017 wafer level test methods for MEMS piezoresistive pressure-sensitive die performances
    MEMS压阻式压力敏感芯片性能的圆片级试验方法
    China National Standards
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    GB/T 33657-2017 Nanotechnologies—Electrical operating parameter test specification of wafer level nano-scale phase change memory cells
    纳米技术 晶圆级纳米尺度相变存储单元电学操作参数测试规范
    China National Standards
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    GB/T 35310-2017 200mm silicon epitaxial wafer
    200mm硅外延片
    China National Standards
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    GB/T 35308-2017 Epitaxial wafers of germanium based Ⅲ-Ⅴcompounds for solar cell
    太阳能电池用锗基Ⅲ-Ⅴ族化合物外延片
    China National Standards
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    GB/T 35305-2017 Monocrystalline gallium arsenide polished wafers for solar cell
    太阳能电池用砷化镓单晶抛光片
    China National Standards
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    GB/T 32988-2016 Synthetic quartz crystal wafer for optical low pass filter (OLPF)
    人造石英光学低通滤波器晶片
    China National Standards
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    GB/T 32814-2016 Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process
    硅基MEMS制造技术 基于SOI硅片的MEMS工艺规范
    China National Standards
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    GB/T 32281-2015 Test method for measuring oxygen, carbon, boron and phosphorus in solar silicon wafers and feedstock by secondary ion mass spectrometry
    太阳能级硅片和硅料中氧、碳、硼和磷量的测定 二次离子质谱法
    China National Standards
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    GB/T 32280-2015 Test method for warp of silicon wafers—Automated non-contact scanning method
    硅片翘曲度测试 自动非接触扫描法
    China National Standards
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    GB/T 32279-2015 Specification for order entry format of silicon wafers
    硅片订货单格式输入规范
    China National Standards
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    GB/T 32278-2015 Test methods for flatness of monocrystalline silicon carbide wafers
    碳化硅单晶片平整度测试方法
    China National Standards
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    GB/T 24578-2015 Test method for measuring surface metal contamination on silicon wafers by total reflection X-Ray fluorescence spectroscopy
    硅片表面金属沾污的全反射X光荧光光谱测试方法
    China National Standards
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    GB/T 31351-2014 Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers
    碳化硅单晶抛光片微管密度无损检测方法
    China National Standards
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    GB/T 30656-2014 Polished monocrystalline silicon carbide wafers
    碳化硅单晶抛光片
    China National Standards
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    GB/T 30860-2014 Test methods for surface roughness and saw mark of silicon wafers for solar cells
    太阳能电池用硅片表面粗糙度及切割线痕测试方法
    China National Standards
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    GB/T 30859-2014 Test method for warp and waviness of silicon wafers for solar cells
    太阳能电池用硅片翘曲度和波纹度测试方法
    China National Standards
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    GB/T 30869-2014 Test method for thickness and total thickness variation of silicon wafers for solar cell
    太阳能电池用硅片厚度及总厚度变化测试方法
    China National Standards
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    GB/T 30868-2014 Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching
    碳化硅单晶片微管密度的测定 化学腐蚀法
    China National Standards
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    GB/T 30867-2014 Test method for measuring thickness and total thickness variation of monocrystalline silicon carbide wafers
    碳化硅单晶片厚度和总厚度变化测试方法
    China National Standards
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    GB/T 30866-2014 Test method for measuring diameter of monocrystalline silicon carbide wafers
    碳化硅单晶片直径测试方法
    China National Standards
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    GB/T 30701-2014 Surface chemical analysis―Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
    表面化学分析 硅片工作标准样品表面元素的化学收集方法和全反射X射线荧光光谱法(TXRF)测定
    China National Standards
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    GB/T 30118-2013 Single crystal wafers for surface acoustic wave (SAW) device applications―Specifications and measuring methods
    声表面波(SAW)器件用单晶晶片规范与测量方法
    China National Standards
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    GB/T 29507-2013 Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning
    硅片平整度、厚度及总厚度变化测试 自动非接触扫描法
    China National Standards
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    GB/T 29506-2013 300mm polished monocrystalline silicon wafers
    300mm 硅单晶抛光片
    China National Standards
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    GB/T 29505-2013 Test method for measuring surface roughness on planar surfaces of silicon wafer
    硅片平坦表面的表面粗糙度测量方法
    China National Standards
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    GB/T 29055-2012 Multi-crystalline silicon wafer for solar cell
    太阳电池用多晶硅片
    China National Standards
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    GB 50809-2012 Code for design of silicon integrated circuits wafer fab
    硅集成电路芯片工厂设计规范
    China National Standards
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    GB/T 28276-2012 Silicon-based MEMS fabrication technology - Specification for the dissolved wafer process
    硅基MEMS制造技术 体硅溶片工艺规范
    China National Standards
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    GB/T 26144-2010 Liner fluoroplatics for flanged ang wafer steel butterfly valve
    法兰和对夹连接钢制衬氟塑料蝶阀
    China National Standards
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    GB/T 3610-2010 Zinc wafer for dry cell
    电池锌饼
    China National Standards
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    GB/T 26070-2010 Characterization of subsurface damage in polished compound semiconductor wafers by reflectance difference spectroscopy method
    化合物半导体抛光晶片亚表面损伤的反射差分谱测试方法
    China National Standards
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    GB/T 26069-2010 Specification for silicon annealed wafers
    硅退火片规范
    China National Standards
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    GB/T 26068-2010 Test method for carrier recombination lifetime in silicon wafers by non-contact measurement of photoconductivity decay by microwave reflectance
    硅片载流子复合寿命的无接触微波反射光电导衰减测试方法
    China National Standards
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    GB/T 26067-2010 Standard test method for dimensions of notches on silicon wafers
    硅片切口尺寸测试方法
    China National Standards
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    GB/T 26065-2010 Specification for polished test silicon wafers
    硅单晶抛光试验片规范
    China National Standards
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    GB/T 26064-2010 Lithium wafers
    锂圆片
    China National Standards
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    GB/T 25188-2010 Thickness measurements for ultrathin silicon oxide layers on silicon wafers X-ray photoelectron spectroscopy
    硅晶片表面超薄氧化硅层厚度的测量 X射线光电子能谱法
    China National Standards
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    GB/T 6619-2009 Test methods for bow of silicon wafers
    硅片弯曲度测试方法
    China National Standards
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    GB/T 6617-2009 Test method for measuring resistivity of silicon wafer using spreading resistance probe
    硅片电阻率测定 扩展电阻探针法
    China National Standards
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    GB/T 6616-2009 Test methods for measuring resistivity of semiconductor wafers or sheet resistance of semiconductor films with a noncontact eddy-current gauge
    半导体硅片电阻率及硅薄膜薄层电阻测试方法 非接触涡流法
    China National Standards
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    GB/T 4058-2009 Test method for detection of oxidation induced defects in polished silicon wafers
    硅抛光片氧化诱生缺陷的检验方法
    China National Standards
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    GB/T 24578-2009 Test method for measuring surface metal contamination on silicon wafers by total reflection X-ray fluorescence spectroscopy
    硅片表面金属沾污的全反射X光荧光光谱测试方法
    China National Standards
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    GB/T 24577-2009 Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography
    热解吸气相色谱法测定硅片表面的有机污染物
    China National Standards
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    GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
    硅片直径测量方法
    China National Standards
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    GB/T 14139-2009 Silicon epitaxial wafers
    硅外延片
    China National Standards
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    GB/T 13388-2009 Method for measuring crystallographic orientation of flats on single-crystal silicon slices and wafers by X-ray techniques
    硅片参考面结晶学取向X射线测试方法
    China National Standards
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    GB/T 13387-2009 Test method for measuring flat length wafers of silicon and other electronic materials
    硅及其它电子材料晶片参考面长度测量方法
    China National Standards
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    GB/T 12238-2008 Flanged and wafer resilient seal butterfly valves
    法兰和对夹连接弹性密封蝶阀
    China National Standards
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    GB/T 11094-2007 Horizontal bridgman grown gallium arsenide single crystal and cutting wafer
    水平法砷化镓单晶及切割片
    China National Standards
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    GB/T 19922-2005 Standard test methods for measuring site flatness on silicon wafers by noncontact scanning
    硅片局部平整度非接触式标准测试方法
    China National Standards
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    GB/T 19921-2005 Test method of particles on silicon wafer surfaces
    硅抛光片表面颗粒测试方法
    China National Standards
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    GB/T 19444-2004 Oxygen precipitation characterization of silicon wafers by measurement of interstitial oxygen reduction
    硅片氧沉淀特性的测定 间隙氧含量减少法
    China National Standards
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    GB/T 12964-2003 Monocrystalline silicon polished wafers
    硅单晶抛光片
    China National Standards
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    GB/T 16596-1996 Specification for establishing a wafer coordinatesystem
    确定晶片坐标系规范
    China National Standards
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    GB/T 16595-1996 Specification for a universal wafer grid
    晶片通用网格规范
    China National Standards
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    GB/T 14015-1992 Silicon on sapphire epitaxial wafers
    硅-蓝宝石外延片
    China National Standards
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