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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| GB/T 30652-2023 |
Trichlorosilane for silicon epitaxy {译} 硅外延用三氯氢硅 |
China National Standards Trichlorosilane silicon epitaxy |
 English PDF |
| GB/T 29056-2012 |
Trichlorosilane for silicon epitaxy - Determination of boron，aluminium，phosphorus，vanadium，chrome，manganese，iron，cobalt，nickel，copper，molybdenum，arsenic and antimony content - Inductively coupled plasma mass spectrometric method 硅外延用三氯氢硅化学分析方法 硼、铝、磷、钒、铬、锰、铁、钴、镍、铜、钼、砷和锑量的测定 电感耦合等离子体质谱法 |
China National Standards Trichlorosilane silicon epitaxy |
English PDF |
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