Standard Code | Standard Title | Standard Class | Order |
---|---|---|---|
GB/T 14847-2010 |
Test mothod for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance 重掺杂衬底上轻掺杂硅外延层厚度的红外反射测量方法 |
China National Standards heavily |
English PDF |
GB/T 24580-2009 |
Test method for measuring boron contamination in heavily doped n-type silicon substrates by secondary ion mass spectrometry 重掺n型硅衬底中硼沾污的二次离子质谱检测方法 |
China National Standards heavily |
English PDF |
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