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| Standard Code | Standard Title | Standard Class | Order |
|---|---|---|---|
| JC/T 2243-2014 |
Quartz tube covered in a film for PECVD 等离子体增强化学气相沉积工艺用覆膜石英管 |
China Building Materials
Standards CVD |
 English PDF |
| SJ 20984-2008 |
General specification for chemical vapor deposition(CVD) equipment 化学气相淀积(cvd)设备通用规范 |
China Electronics
Standards CVD |
English PDF |
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